基于Fano共振的折射率传感器设计

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文章编号： 1672-6987（2022）03012007； DOI： 10.16351/j.1672-6987.2022.03.017

韩程章， 代美芹， 赵秋玲， 王霞(青岛科技大学 a.数理学院，山东 青岛 266061；b.山东省新型光电材料与技术工程实验室，山东 青岛 266061)

摘要： 设计了一种由金红石棱镜、ITO薄膜、氟化镁薄膜、氮化铝薄膜和待测溶液层构成的新型折射率传感器。该传感器全部由非金属材料构成，通过采用ITO薄膜取代传统的金银薄膜作为等离子体材料，可以在近红外波段激发出表面等离子体激元，有利于提高传感器的灵敏度。首次将氮化铝薄膜引入到折射率传感器领域，在生物分子固定和检测方面具有良好的效果。通过调节各层薄膜的厚度可以对传感器的参数进行调节，从而实现Fano共振和等离激元诱导透明。该传感器的强度灵敏度可达到1 5923 RIU-1，相位灵敏度可达到229 716°每RIU，品质因数比传统的SPR传感器高183倍。该传感器结构简单，灵敏度高，在生物医学领域有着巨大的应用潜力。

关键词： Fano共振; 氮化铝薄膜; 折射率传感器; 等离激元诱导反射

中图分类号： O 431.1文献标志码： A

引用格式： 韩程章， 代美芹， 赵秋玲， 等. 基于Fano共振的折射率传感器设计［J］. 青岛科技大学学报(自然科学版), 2022, 43(3): 120126.

HAN Chengzhang, DAI Meiqin, ZHAO Qiuling, et al. Research on refractive index sensor based on fano resonance［J］. Journal of Qingdao University of Science and Technology（Natural Science Edition), 2022， 43（3）： 120126.

Research on Refractive Index Sensor Based on Fano Resonance

HAN Chengzhang, DAI Meiqin, ZHAO Qiuling, WANG Xia

(a.College of Mathematics and Physics; b.Shandong Province New Optoelectronic Materials and

Technology Engineering Laboratory, Qingdao University of Science and Technology, Qingdao 266061, China)

Abstract: A new type of refractive index sensor composed of rutile prism, ITO film, magnesium fluoride film, aluminum nitride film and solution layer to be measured was proposed. The sensor is entirely made of nonmetallic materials and uses ITO film instead of the traditional gold and silver film as the plasma material, which can excite surface plasmons in the nearinfrared band and is beneficial to improve the sensitivity of the sensor. It is the first time that aluminum nitride film is introduced into the field of refractive index sensors, which has a good effect in the immobilization and detection of biomolecules. The parameters of the sensor can be adjusted by adjusting the thickness of each layer of film to achieve Fano resonance and plasmon induced transparency (PIT). The intensity sensitivity of the sensor can reach 1 5923 RIU-1, the phase sensitivity can reach 229 716 (°)·RIU-1, and the quality factor is 183 times higher than that of the traditional SPR sensor. The sensor with a simple structure and high sensitivity has huge application potential in biomedicine.

Key words: Fano resonance; aluminum nitride film; refractive index sensor; plasmon induced reflection

收稿日期： 20210712

基金项目： 国家自然科学基金项目(11874232)，山东省重点研发计划项目（2018GGX101008）.

作者简介： 韩程章(1985—),男,讲师.