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李毅1， 敬承斌2*
（1.青岛科技大学 材料科学与工程学院，山东 青岛 266042; 2. 华东师范大学 极化材料与器件教育部重点实验室，上海 200241）
摘要: 采用酸诱导液相沉积法在石英玻璃管内壁生长了二氧化锗内反射膜，GeO2能够与OH-离子反应生成可溶性锗酸根离子，从而使GeO2在氨水和氢氧化钠溶液中的溶解度大大提高。通过向所合成的锗酸根离子前驱液中加入酸，使锗酸根离子被逐步分解为GeO2溶质析出。将酸化的锗酸根离子水溶液通入石英毛细管，可在毛细管内壁上逐渐液相沉积生长出GeO2陶瓷膜。将试样在GeO2的熔点(1 115 ℃)附近热处理，可以得到致密的GeO2膜。实验结果表明GeO2-氨水体系制备的GeO2空心光波导对二氧化碳激光的直线传输损耗为0.9 ~2.44 dB·m-1。当前驱体的固含量（质量分数，下同）从5%增大到7%制备的二氧化锗空芯光波导的传输损耗降低，前驱体的固含量为8%和9%制备的空芯光波导的传输损耗大于固含量为7%。
关键词: 二氧化锗； 酸诱导液相沉积法； 固含量； 传输损耗
中图分类号: TB 34文献标志码： A
收稿日期：2012-01-06
作者简介： 李毅(1986—)，男，硕士研究生.*通信联系人.
Acid Induced Liquid Phase Deposition Progress of GeO2-Based Hollow Waveguide
LI Yi1, JING Cheng-bin2
(1.College of Materials Science and Engineering,QingdaoUniversityof Science and Technology,Qingdao266042,China;
2.Key Laboratory of Polar Materials and Devices, Ministry of Education, East China Normal University， Shanghai 200241，China）
Abstract: The features and applications of hollow optical waveguide are introduced in this thesis. The GeO2 ceramic film was grown on the inner wall of a silica glass tube using an acid-induced liquid phase deposition (acid-induced LPD) method. The interreaction between GeO2 and OH- can produce soluble germanate ions. The solubility of GeO2 in an alkaline aqueous solution can be increased. By designedly adding acid into the aqueous germanate ion solution, GeO2 solid phases can gradually precipitate out of the solution. GeO2 ceramic films may be gradually formed inside a silica glass tube filled with aqueous acidic germanate ion solution. A compact GeO2 reflective film is produced by sintering the ceramic film at a temperature around the melting point of GeO2 (1 115 ℃). The results show that the GeO2 hollow waveguides fabricated using the GeO2-ammonia precursor solution exhibit transmission loss values within 0.19—2.44 dB·m-1. The transmission loss decreases as the concentration of the aqueous germanate ion solution increases from 5% to 7%. The loss of the sample deposited from the 8%—9% GeO2 solution is higher than that of the sample deposited from the 7% solution. The sample deposited from the 9% solution has a lower loss than the sample deposited from the 8% solution.
Key words: germanium dioxide; acid induced liquid phase deposition method; solid content; transmission loss
